Molybdenum enhanced low-temperature deposition of crystalline silicon nitride
Patent
·
OSTI ID:869222
- Powell, TN
A process for chemical vapor deposition of crystalline silicon nitride which comprises the steps of: introducing a mixture of a silicon source, a molybdenum source, a nitrogen source, and a hydrogen source into a vessel containing a suitable substrate; and thermally decomposing the mixture to deposit onto the substrate a coating comprising crystalline silicon nitride containing a dispersion of molybdenum silicide.
- Research Organization:
- LOCKHEED MARTIN ENRGY SYST INC
- DOE Contract Number:
- AC05-84OR21400
- Assignee:
- Martin Marietta Energy Systems, Inc. (Oak Ridge, TN)
- Patent Number(s):
- US 5300322
- OSTI ID:
- 869222
- Country of Publication:
- United States
- Language:
- English
| CVD of Si3N4 and Its Composites | book | |
Pyrolytic Si3N4
|
journal | August 1972 |
Chemical Vapor Deposition of Silicon Nitride
|
journal | October 1976 |
CVD Fabrication of In-situ Composites of Non-Oxide Ceramics
|
book | January 1986 |
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Related Subjects
/427/
chemical
chemical vapor
coating
coating comprising
comprises
comprising
containing
crystalline
crystalline silicon
decomposing
deposit
deposition
dispersion
enhanced
hydrogen
introducing
low-temperature
low-temperature deposition
mixture
molybdenum
molybdenum silicide
nitride
nitrogen
nitrogen source
process
silicide
silicon
silicon nitride
silicon source
source
steps
substrate
suitable
suitable substrate
temperature deposition
thermally
thermally decomposing
vapor
vapor deposition
vessel
vessel containing
chemical
chemical vapor
coating
coating comprising
comprises
comprising
containing
crystalline
crystalline silicon
decomposing
deposit
deposition
dispersion
enhanced
hydrogen
introducing
low-temperature
low-temperature deposition
mixture
molybdenum
molybdenum silicide
nitride
nitrogen
nitrogen source
process
silicide
silicon
silicon nitride
silicon source
source
steps
substrate
suitable
suitable substrate
temperature deposition
thermally
thermally decomposing
vapor
vapor deposition
vessel
vessel containing