Laser patterning of laminated structures for electroplating

Patent · Thu Dec 31 23:00:00 EST 1992

OSTI ID:869025

Mayer, Steven T ^[1]; Evans, Leland B ^[2]

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1. San Leandro, CA
2. Antioch, CA

A process for laser patterning of a substrate so that it can be subsequently electroplated or electrolessly plated. The process utilizes a laser to treat an inactive (inert) layer formed over an active layer to either combine or remove the inactive layer to produce a patterned active layer on which electrodeposition can occur. The process is carried out by utilizing laser alloying and laser etching, and involves only a few relatively high yield steps and can be performed on a very small scale.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA
• DOE Contract Number: W-7405-ENG-48
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 5264108
• OSTI ID: 869025
• Country of Publication: United States
• Language: English

Related Subjects

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active
active layer
alloying
carried
combine
electrodeposition
electrolessly
electrolessly plated
electroplated
electroplating
etching
formed
inactive
inert
involves
laminated
laminated structure
laminated structures
laser
laser patterning
layer
layer formed
occur
patterned
patterning
performed
plated
process
process utilizes
produce
relatively
remove
scale
steps
structures
subsequently
substrate
treat
utilizes
utilizing
yield