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Title: Production of N.sup.+ ions from a multicusp ion beam apparatus

Abstract

A method of generating a high purity (at least 98%) N.sup.+ ion beam using a multicusp ion source (10) having a chamber (11) formed by a cylindrical chamber wall (12) surrounded by a plurality of magnets (13), a filament (57) centrally disposed in said chamber, a plasma electrode (36) having an extraction orifice (41) at one end of the chamber, a magnetic filter having two parallel magnets (21, 22) spaced from said plasma electrode (36) and dividing the chamber (11) into arc discharge and extraction regions. The method includes ionizing nitrogen gas in the arc discharge region of the chamber (11), maintaining the chamber wall (12) at a positive voltage relative to the filament (57) and at a magnitude for an optimum percentage of N.sup.+ ions in the extracted ion beams, disposing a hot liner (45) within the chamber and near the chamber wall (12) to limit recombination of N.sup.+ ions into the N.sub.2.sup.+ ions, spacing the magnets (21, 22) of the magnetic filter from each other for optimum percentage of N.sup.3 ions in the extracted ion beams, and maintaining a relatively low pressure downstream of the extraction orifice and of a magnitude (preferably within the range of 3-8.times.10.sup.-4 torr)more » for an optimum percentage of N.sup.+ ions in the extracted ion beam.« less

Inventors:
 [1];  [2];  [3]
  1. Hercules, CA
  2. Berkeley, CA
  3. Salem, MA
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
OSTI Identifier:
868720
Patent Number(s):
US 5198677
Assignee:
United States of America as represented by United States (Washington, DC)
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
production; multicusp; beam; apparatus; method; generating; purity; 98; source; 10; chamber; 11; formed; cylindrical; wall; 12; surrounded; plurality; magnets; 13; filament; 57; centrally; disposed; plasma; electrode; 36; extraction; orifice; 41; magnetic; filter; parallel; 21; 22; spaced; dividing; discharge; regions; ionizing; nitrogen; gas; region; maintaining; positive; voltage; relative; magnitude; optimum; percentage; extracted; beams; disposing; hot; liner; 45; near; limit; recombination; spacing; relatively; pressure; downstream; preferably; range; 3-8; times; -4; torr; beam apparatus; nitrogen gas; centrally disposed; magnetic filter; discharge region; chamber wall; cylindrical chamber; positive voltage; plasma electrode; extraction region; /250/313/

Citation Formats

Leung, Ka-Ngo, Kunkel, Wulf B, and Walther, Steven R. Production of N.sup.+ ions from a multicusp ion beam apparatus. United States: N. p., 1993. Web.
Leung, Ka-Ngo, Kunkel, Wulf B, & Walther, Steven R. Production of N.sup.+ ions from a multicusp ion beam apparatus. United States.
Leung, Ka-Ngo, Kunkel, Wulf B, and Walther, Steven R. Fri . "Production of N.sup.+ ions from a multicusp ion beam apparatus". United States. https://www.osti.gov/servlets/purl/868720.
@article{osti_868720,
title = {Production of N.sup.+ ions from a multicusp ion beam apparatus},
author = {Leung, Ka-Ngo and Kunkel, Wulf B and Walther, Steven R},
abstractNote = {A method of generating a high purity (at least 98%) N.sup.+ ion beam using a multicusp ion source (10) having a chamber (11) formed by a cylindrical chamber wall (12) surrounded by a plurality of magnets (13), a filament (57) centrally disposed in said chamber, a plasma electrode (36) having an extraction orifice (41) at one end of the chamber, a magnetic filter having two parallel magnets (21, 22) spaced from said plasma electrode (36) and dividing the chamber (11) into arc discharge and extraction regions. The method includes ionizing nitrogen gas in the arc discharge region of the chamber (11), maintaining the chamber wall (12) at a positive voltage relative to the filament (57) and at a magnitude for an optimum percentage of N.sup.+ ions in the extracted ion beams, disposing a hot liner (45) within the chamber and near the chamber wall (12) to limit recombination of N.sup.+ ions into the N.sub.2.sup.+ ions, spacing the magnets (21, 22) of the magnetic filter from each other for optimum percentage of N.sup.3 ions in the extracted ion beams, and maintaining a relatively low pressure downstream of the extraction orifice and of a magnitude (preferably within the range of 3-8.times.10.sup.-4 torr) for an optimum percentage of N.sup.+ ions in the extracted ion beam.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {1}
}

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