Production of N[sup +] ions from a multicusp ion beam apparatus
A method of generating a high purity (at least 98%) N[sup +] ion beam using a multicusp ion source having a chamber formed by a cylindrical chamber wall surrounded by a plurality of magnets, a filament centrally disposed in said chamber, a plasma electrode having an extraction orifice at one end of the chamber, a magnetic filter having two parallel magnets spaced from said plasma electrode and dividing the chamber into arc discharge and extraction regions. The method includes ionizing nitrogen gas in the arc discharge region of the chamber, maintaining the chamber wall at a positive voltage relative to the filament and at a magnitude for an optimum percentage of N[sup +] ions in the extracted ion beams, disposing a hot liner within the chamber and near the chamber wall to limit recombination of N[sup +] ions into the N[sub 2][sup +] ions, spacing the magnets of the magnetic filter from each other for optimum percentage of N[sup 3] ions in the extracted ion beams, and maintaining a relatively low pressure downstream of the extraction orifice and of a magnitude (preferably within the range of 3-8[times]10[sup [minus]4] torr) for an optimum percentage of N[sup +] ions in the extracted ion beam.
- DOE Contract Number:
- AC03-76SF00098
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- Patent Number(s):
- A; US 5198677
- Application Number:
- PPN: US 7-774912
- OSTI ID:
- 6042918
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BEAM EXTRACTION
BEAMS
CATIONS
CHARGED PARTICLES
ELECTRIC DISCHARGES
ELECTRODES
FILTERS
ION BEAMS
ION SOURCES
IONS
LINERS
MAGNETIC FILTERS
NITROGEN IONS
OPENINGS
ORIFICES
RECOMBINATION
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Targets-- (1992-)