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Title: Photo ion spectrometer

Abstract

A method and apparatus for extracting for quantitative analysis ions of selected atomic components of a sample. A lens system is configured to provide a slowly diminishing field region for a volume containing the selected atomic components, enabling accurate energy analysis of ions generated in the slowly diminishing field region. The lens system also enables focusing on a sample of a charged particle beam, such as an ion beam, along a path length perpendicular to the sample and extraction of the charged particles along a path length also perpendicular to the sample. Improvement of signal to noise ratio is achieved by laser excitation of ions to selected autoionization states before carrying out quantitative analysis. Accurate energy analysis of energetic charged particles is assured by using a preselected resistive thick film configuration disposed on an insulator substrate for generating predetermined electric field boundary conditions to achieve for analysis the required electric field potential. The spectrometer also is applicable in the fields of SIMS, ISS and electron spectroscopy.

Inventors:
 [1];  [2];  [3]
  1. (Downers Grove, IL)
  2. (Westmont, IL)
  3. (Naperville, IL)
Publication Date:
Research Org.:
Argonne National Laboratory (ANL), Argonne, IL
OSTI Identifier:
867096
Patent Number(s):
US 4864130
Assignee:
Arch Development Corporation (Chicago, IL) ANL
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
photo; spectrometer; method; apparatus; extracting; quantitative; analysis; selected; atomic; components; sample; lens; configured; provide; slowly; diminishing; field; region; volume; containing; enabling; accurate; energy; generated; enables; focusing; charged; particle; beam; path; length; perpendicular; extraction; particles; improvement; signal; noise; ratio; achieved; laser; excitation; autoionization; carrying; energetic; assured; preselected; resistive; thick; film; configuration; disposed; insulator; substrate; generating; predetermined; electric; boundary; conditions; achieve; required; potential; applicable; fields; sims; iss; electron; spectroscopy; volume containing; selected atomic; thick film; quantitative analysis; path length; particle beam; charged particles; electric field; charged particle; field region; atomic components; noise ratio; required electric; atomic component; predetermined electric; slowly diminishing; insulator substrate; diminishing field; field boundary; laser excitation; boundary conditions; field potential; film configuration; generating predetermined; electron spectroscopy; selected atom; /250/

Citation Formats

Gruen, Dieter M., Young, Charles E., and Pellin, Michael J.. Photo ion spectrometer. United States: N. p., 1989. Web.
Gruen, Dieter M., Young, Charles E., & Pellin, Michael J.. Photo ion spectrometer. United States.
Gruen, Dieter M., Young, Charles E., and Pellin, Michael J.. Sun . "Photo ion spectrometer". United States. https://www.osti.gov/servlets/purl/867096.
@article{osti_867096,
title = {Photo ion spectrometer},
author = {Gruen, Dieter M. and Young, Charles E. and Pellin, Michael J.},
abstractNote = {A method and apparatus for extracting for quantitative analysis ions of selected atomic components of a sample. A lens system is configured to provide a slowly diminishing field region for a volume containing the selected atomic components, enabling accurate energy analysis of ions generated in the slowly diminishing field region. The lens system also enables focusing on a sample of a charged particle beam, such as an ion beam, along a path length perpendicular to the sample and extraction of the charged particles along a path length also perpendicular to the sample. Improvement of signal to noise ratio is achieved by laser excitation of ions to selected autoionization states before carrying out quantitative analysis. Accurate energy analysis of energetic charged particles is assured by using a preselected resistive thick film configuration disposed on an insulator substrate for generating predetermined electric field boundary conditions to achieve for analysis the required electric field potential. The spectrometer also is applicable in the fields of SIMS, ISS and electron spectroscopy.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 1989},
month = {Sun Jan 01 00:00:00 EST 1989}
}

Patent:

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