Photo ion spectrometer
- Downers Grove, IL
- Westmont, IL
- Naperville, IL
A method and apparatus for extracting for quantitative analysis ions of selected atomic components of a sample. A lens system is configured to provide a slowly diminishing field region for a volume containing the selected atomic components, enabling accurate energy analysis of ions generated in the slowly diminishing field region. The lens system also enables focusing on a sample of a charged particle beam, such as an ion beam, along a path length perpendicular to the sample and extraction of the charged particles along a path length also perpendicular to the sample. Improvement of signal to noise ratio is achieved by laser excitation of ions to selected autoionization states before carrying out quantitative analysis. Accurate energy analysis of energetic charged particles is assured by using a preselected resistive thick film configuration disposed on an insulator substrate for generating predetermined electric field boundary conditions to achieve for analysis the required electric field potential. The spectrometer also is applicable in the fields of SIMS, ISS and electron spectroscopy.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- DOE Contract Number:
- W-31109-ENG-38
- Assignee:
- Arch Development Corporation (Chicago, IL)
- Patent Number(s):
- US 4864130
- OSTI ID:
- 867096
- Country of Publication:
- United States
- Language:
- English
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Photo ion spectrometer
Photo ion spectrometer
Related Subjects
spectrometer
method
apparatus
extracting
quantitative
analysis
selected
atomic
components
sample
lens
configured
provide
slowly
diminishing
field
region
volume
containing
enabling
accurate
energy
generated
enables
focusing
charged
particle
beam
path
length
perpendicular
extraction
particles
improvement
signal
noise
ratio
achieved
laser
excitation
autoionization
carrying
energetic
assured
preselected
resistive
thick
film
configuration
disposed
insulator
substrate
generating
predetermined
electric
boundary
conditions
achieve
required
potential
applicable
fields
sims
iss
electron
spectroscopy
volume containing
selected atomic
thick film
quantitative analysis
path length
particle beam
charged particles
electric field
charged particle
field region
atomic components
noise ratio
required electric
atomic component
predetermined electric
slowly diminishing
insulator substrate
diminishing field
field boundary
laser excitation
boundary conditions
field potential
film configuration
generating predetermined
electron spectroscopy
selected atom
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