Photo ion spectrometer

Patent · Tue Aug 08 04:00:00 EDT 1989

OSTI ID:7164556

Gruen, D M; Young, C E; Pellin, M J

A method and apparatus are described for extracting for quantitative analysis ions of selected atomic components of a sample. A lens system is configured to provide a slowly diminishing field region for a volume containing the selected atomic components, enabling accurate energy analysis of ions generated in the slowly diminishing field region. The lens system also enables focusing on a sample of a charged particle beam, such as an ion beam, along a path length perpendicular to the sample and extraction of the charged particles along a path length also perpendicular to the sample. Improvement of signal to noise ratio is achieved by laser excitation of ions to selected auto-ionization states before carrying out quantitative analysis. Accurate energy analysis of energetic charged particles is assured by using a preselected resistive thick film configuration disposed on an insulator substrate for generating predetermined electric field boundary conditions to achieve for analysis the required electric field potential. The spectrometer also is applicable in the fields of SIMS, ISS and electron spectroscopy. 8 figs.

• DOE Contract Number: W-31109-ENG-38
• Assignee: ARCH Development Corp., Chicago, IL (United States)
• Patent Number(s): A; US 4855596
• Application Number: PPN: US 7-046117
• OSTI ID: 7164556
• Country of Publication: United States
• Language: English

Related Subjects

440800* -- Miscellaneous Instrumentation-- (1990-)
47 OTHER INSTRUMENTATION
BEAMS
CHEMICAL ANALYSIS
DESIGN
FOCUSING
ION BEAMS
ION MICROPROBE ANALYSIS
ION SCATTERING ANALYSIS
LENSES
MASS SPECTROSCOPY
MEASURING INSTRUMENTS
MICROANALYSIS
NONDESTRUCTIVE ANALYSIS
OPERATION
QUANTITATIVE CHEMICAL ANALYSIS
SPECTROMETERS
SPECTROSCOPY