Umbra/penumbra detector
Patent
·
OSTI ID:866739
A device which monitors the characteristics of an image cast upon a radiation sensitive substrate. This includes a shadow casting object or mask and at least one source of radiation disposed above the object or mask so that the image cast on the substrate can be analyzed.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
- DOE Contract Number:
- AC03-76SF00098
- Assignee:
- Carner, Jr., Don C. (132 Eagle Rock Ave., Channel Islands, CA 93035)
- Patent Number(s):
- US 4777360
- OSTI ID:
- 866739
- Country of Publication:
- United States
- Language:
- English
Similar Records
Umbra/penumbra detector
PHOTOSENSITIVE GAS PHASE ETCHING OF SEMICONDUCTORS BY SELECTIVE RADIATION
Radiation melting of semiconductor surface areas through a remote mask
Patent
·
Tue Oct 11 00:00:00 EDT 1988
·
OSTI ID:7067545
PHOTOSENSITIVE GAS PHASE ETCHING OF SEMICONDUCTORS BY SELECTIVE RADIATION
Patent
·
Tue Jun 25 00:00:00 EDT 1963
·
OSTI ID:4712391
Radiation melting of semiconductor surface areas through a remote mask
Patent
·
Mon Feb 08 23:00:00 EST 1988
·
OSTI ID:5418047