Umbra/penumbra detector
Patent
·
OSTI ID:7067545
A device which monitors the characteristics of an image cast upon a radiation sensitive substrate. This includes a shadow casting object or mask and at least one source of radiation disposed above the object or mask so that the image cast on the substrate can be analyzed. 23 figs.
- DOE Contract Number:
- AC03-76SF00098
- Assignee:
- PTO; EDB-94-118334
- Patent Number(s):
- A; US 4777360
- Application Number:
- PPN: US 6-933872
- OSTI ID:
- 7067545
- Country of Publication:
- United States
- Language:
- English
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