Liquid metal ion source and alloy

Patent · Tue Oct 04 04:00:00 EDT 1988

OSTI ID:866732

Utlaut, Mark W ^[1]; Behrens, Robert G ^[2]; Szklarz, Eugene G ^[2]; Storms, Edmund K ^[2]; Santandrea, Robert P ^[3]; Swanson, Lynwood W ^[4]

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1. Saugus, CA
2. Los Alamos, NM
3. Santa Fe, NM
4. McMinnville, OR

A liquid metal ion source and alloy, wherein the species to be emitted from the ion source is contained in a congruently vaporizing alloy. In one embodiment, the liquid metal ion source acts as a source of arsenic, and in a source alloy the arsenic is combined with palladium, preferably in a liquid alloy having a range of compositions from about 24 to about 33 atomic percent arsenic. Such an alloy may be readily prepared by a combustion synthesis technique. Liquid metal ion sources thus prepared produce arsenic ions for implantation, have long lifetimes, and are highly stable in operation.

• Assignee: Hughes Aircraft Company (Los Angeles, CA); Oregon Graduate Center (Beaverton, OR); United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4775818
• Application Number: 06/851,757
• OSTI ID: 866732
• Country of Publication: United States
• Language: English

Related Subjects

/313/
24
33
alloy
arsenic
atomic
atomic percent
combined
combustion
combustion synthesis
compositions
congruently
contained
embodiment
emitted
highly
highly stable
implantation
lifetimes
liquid
liquid metal
metal
operation
palladium
percent
preferably
prepared
produce
range
readily
readily prepared
source
sources
species
stable
synthesis
technique
vaporizing