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Plasma deposition of amorphous metal alloys

Patent ·
OSTI ID:866068
 [1]
  1. Albuquerque, NM
+ Show Author Affiliations

Amorphous metal alloy coatings are plasma-deposited by dissociation of vapors of organometallic compounds and metalloid hydrides in the presence of a reducing gas, using a glow discharge. Tetracarbonylnickel, phosphine, and hydrogen constitute a typical reaction mixture of the invention, yielding a NiPC alloy.

Research Organization:
AT & T CORP
DOE Contract Number:
AC04-76DP00789
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Number(s):
US 4626448
OSTI ID:
866068
Country of Publication:
United States
Language:
English

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Related Subjects

/427/204/
alloy
alloy coating
alloy coatings
alloys
amorphous
amorphous metal
coatings
compounds
constitute
deposition
discharge
dissociation
gas
glow
glow discharge
hydrides
hydrogen
metal
metal alloy
metal alloys
metallic compound
metalloid
metalloid hydrides
mixture
nipc
organometallic
organometallic compound
organometallic compounds
phosphine
plasma
plasma deposition
plasma-deposited
presence
reaction
reaction mixture
reducing
reducing gas
tetracarbonylnickel
typical
vapors
yielding