Plasma deposition of amorphous metal alloys
Patent
·
OSTI ID:5535676
Amorphous metal alloy coatings are plasma-deposited by dissociation of vapors of organometallic compounds and metalloid hydrides in the presence of a reducing gas, using a glow discharge. Tetracarbonylnickel, phosphine, and hydrogen constitute a typical reaction mixture of the invention, yielding a NiPC alloy.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (USA)
- DOE Contract Number:
- AC04-76DP00789
- Assignee:
- Dept. of Energy
- Patent Number(s):
- None
- Application Number:
- ON: DE86013686
- OSTI ID:
- 5535676
- Country of Publication:
- United States
- Language:
- English
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