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U.S. Department of Energy
Office of Scientific and Technical Information

Chemical vapor deposition of sialon

Patent ·
OSTI ID:864253
A laminated composite and a method for forming the composite by chemical vapor deposition. The composite includes a layer of sialon and a material to which the layer is bonded. The method includes the steps of exposing a surface of the material to an ammonia containing atmosphere; heating the surface to at least about 1200.degree. C.; and impinging a gas containing in a flowing atmosphere of air N.sub.2, SiCl.sub.4, and AlCl.sub.3 on the surface.
Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Number(s):
US 4336304
OSTI ID:
864253
Country of Publication:
United States
Language:
English