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U.S. Department of Energy
Office of Scientific and Technical Information

Chemical vapor deposition of sialon

Patent ·
OSTI ID:6474609
A laminated composite and a method for forming the composite by chemical vapor deposition. The composite includes a layer of sialon and a material to which the layer is bonded. The method includes the steps of exposing a surface of the material to an ammonia containing atmosphere; heating the surface to at least about 1200/sup 0/ C; and impinging a gas containing in a flowing atmosphere of air N/sup 2/, SiCl/sub 4/, and AlCl/sub 3/ on the surface.
Assignee:
Dept. of Energy
Patent Number(s):
US 4336304
OSTI ID:
6474609
Country of Publication:
United States
Language:
English