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At-wavelength Detection of EUVL Mask Blank Defects

Journal Article · · The Journal of Vacuum Science and Technology B
OSTI ID:8621
 [1]; ; ; ; ; ; ; ; ; ; ; ; ;
  1. LBNL Library
+ Show Author Affiliations
No abstract prepared.
Research Organization:
Ernest Orlando Lawrence Berkeley National Lab., Berkeley, CA (US)
Sponsoring Organization:
USDOE Office of Science (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
8621
Report Number(s):
LBNL--41791
Journal Information:
The Journal of Vacuum Science and Technology B, Journal Name: The Journal of Vacuum Science and Technology B Journal Issue: 6 Vol. 16
Country of Publication:
United States
Language:
English

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Related Subjects

42 ENGINEERING
DEFECTS
DETECTION
ENGINEERING