At-wavelength Detection of EUVL Mask Blank Defects

Conference · Fri May 08 04:00:00 EDT 1998

OSTI ID:8620

Batson, Phil ^[1]; Bokor, Jeffrey; Gullikson, Eric; Idir, Mourad; Jeong, Seongtae; Johnson, Lewis; Kearney, Patrick; Levesque, Rick; Lin, Yun; Underwood, James H; Yan, Pei-Yang

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1. LBNL Library

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• Research Organization: Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
• Sponsoring Organization: USDOE Office of Science
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 8620
• Report Number(s): LBNL--41791-Abs.
• Country of Publication: United States
• Language: English