Actinic Detection of EUVL Mask Blank Defects on BL6.3.2

Conference · Sun Sep 20 04:00:00 EDT 1998

OSTI ID:8637

Jeong, Seongtae ^[1]; Johnson, Lewis; Lin, Yun; Batson, Phil; Levesque, Rick; Kearney, Patrick; Yan, Pei-Yang; Gullikson, Eric; Underwood, James H; Bokor, Jeffrey

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1. LBNL Library

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• Research Organization: Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
• Sponsoring Organization: USDOE Office of Science
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 8637
• Report Number(s): LBNL--42328-Abs.
• Country of Publication: United States
• Language: English