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Binding Energy of Vacancies to Clusters Formed in Si by High-Energy Ion Implantation

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.1405814· OSTI ID:829050
Research Organization:
ORNL Oak Ridge National Laboratory
Sponsoring Organization:
DOE
DOE Contract Number:
AC05-00OR22725
OSTI ID:
829050
Report Number(s):
P01-110718
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Vol. 79; ISSN 0003-6951
Country of Publication:
United States
Language:
English

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