Binding Energy of Vacancies to Clusters Formed in Si by High-Energy Ion Implantation
- ORNL
- Research Organization:
- ORNL Oak Ridge National Laboratory
- Sponsoring Organization:
- DOE
- DOE Contract Number:
- AC05-00OR22725
- OSTI ID:
- 829050
- Report Number(s):
- P01-110718
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Vol. 79; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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