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High-performance Mo-Si multilayer coatings for extreme-ultraviolet lithography by ion-beam deposition

Journal Article · Tue Jul 01 04:00:00 EDT 2003 · Applied Optics

DOI:https://doi.org/10.1364/AO.42.004049· OSTI ID:816559

Spiller, Eberhard ^[1]; Baker, Sherry L; Mirkarimi, Paul B; Sperry, Victor; Gullikson, Eric M; Stearns, Daniel G

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Research Organization:: Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)

Sponsoring Organization:: USDOE Director. Office of Science. Basic Energy Sciences (US)

DOE Contract Number:: AC03-76SF00098

OSTI ID:: 816559

Report Number(s):: LBNL--53433

Journal Information:: Applied Optics, Journal Name: Applied Optics Journal Issue: 19 Vol. 42; ISSN 0003-6935; ISSN APOPAI

Country of Publication:: United States

Language:: English

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Related Subjects

36 MATERIALS SCIENCE
COATINGS
DEPOSITION
ION BEAMS
LAWRENCE BERKELEY LABORATORY