Electromigration in integrated circuit interconnects studied by X-ray microscopy
Journal Article
·
· Nuclear Instruments and Methods in Physics Research
- LBNL Library
No abstract prepared.
- Research Organization:
- Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
- Sponsoring Organization:
- USDOE Director, Office of Science (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 812465
- Report Number(s):
- LBNL--52909
- Journal Information:
- Nuclear Instruments and Methods in Physics Research, Journal Name: Nuclear Instruments and Methods in Physics Research Vol. 199; ISSN NIMRD9; ISSN 0167-5087
- Country of Publication:
- United States
- Language:
- English
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