Dynamical x-ray microscopy investigation of electromigration in passivated inlaid Cu interconnect structures
- LBNL Library
No abstract prepared.
- Research Organization:
- Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
- Sponsoring Organization:
- USDOE Director, Office of Science. Office of Basic Energy Studies. Materials Science and Engineering Division (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 803771
- Report Number(s):
- LBNL--50214; B& R KC0202030
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 14 Vol. 81; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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