Cathodic arc plasma deposition
Journal Article
·
· Vacuum Technology & Coating
OSTI ID:810482
- LBNL Library
No abstract prepared.
- Research Organization:
- Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
- Sponsoring Organization:
- Administrator for National Nuclear Security Admin. Nonproliferation and National Security Program Direction (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 810482
- Report Number(s):
- LBNL--49915
- Journal Information:
- Vacuum Technology & Coating, Journal Name: Vacuum Technology & Coating Vol. 3
- Country of Publication:
- United States
- Language:
- English
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