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Annealing of nonhydrogenated amorphous carbon films prepared by filtered cathodic arc deposition

Journal Article · Mon Jun 05 00:00:00 EDT 2000 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.1288221· OSTI ID:761418

Monteiro, Othon R ^[1]; Ager, III, Joel W; Lee, Doug H; Lo, Roger Yu; Walter, Kevin C; Nastasi, Michael

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Research Organization:: Lawrence Berkeley National Lab., CA (US)

Sponsoring Organization:: USDOE Director, Office of Science (US)

DOE Contract Number:: AC03-76SF00098

OSTI ID:: 761418

Report Number(s):: LBNL--46247

Journal Information:: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 5 Vol. 88; ISSN JAPIAU; ISSN 0021-8979

Country of Publication:: United States

Language:: English

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Related Subjects

36 MATERIALS SCIENCE
ANNEALING
CARBON
DEPOSITION