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Asymmetric extreme ultraviolet scattering from sputter-deposited multilayers

Journal Article · · Physical Review B: Condensed Matter and Materials Physics

No abstract prepared.

Research Organization:
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
800324
Report Number(s):
LBNL/ALS--29537
Journal Information:
Physical Review B: Condensed Matter and Materials Physics, Journal Name: Physical Review B: Condensed Matter and Materials Physics Journal Issue: 20 Vol. 59
Country of Publication:
United States
Language:
English

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