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Nonspecular scattering from extreme ultraviolet multilayer coatings

Journal Article · Thu Jun 01 00:00:00 EDT 2000 · Physica B: Condensed Matter (Amsterdam)

DOI:https://doi.org/10.1016/S0921-4526(99)01897-9· OSTI ID:800101

Stearns, D G ^[1]; Gullikson, Eric M

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Research Organization:: Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)

Sponsoring Organization:: US Department of Energy (US)

DOE Contract Number:: AC03-76SF00098

OSTI ID:: 800101

Report Number(s):: LBNL/ALS--12855

Journal Information:: Physica B: Condensed Matter (Amsterdam), Journal Name: Physica B: Condensed Matter (Amsterdam) Journal Issue: 1-3 Vol. 283

Country of Publication:: United States

Language:: English

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