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Asymmetric EUV scattering from sputter deposited multilayers

Journal Article · · Physical Review, B: Condensed Matter
OSTI ID:898274
;

No abstract prepared.

Research Organization:
Ernest Orlando Lawrence Berkeley NationalLaboratory, Berkeley, CA (US)
Sponsoring Organization:
USDOE Director, Office of Energy Research
DOE Contract Number:
AC02-05CH11231
OSTI ID:
898274
Report Number(s):
LBNL--42310
Journal Information:
Physical Review, B: Condensed Matter, Journal Name: Physical Review, B: Condensed Matter Journal Issue: 20 Vol. 59; ISSN 0163-1829
Country of Publication:
United States
Language:
English

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Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ASYMMETRY
EXTREME ULTRAVIOLET RADIATION
SCATTERING
SPUTTERING
VAPOR DEPOSITED COATINGS