Skip to main content

Molybdenum-ruthenium/beryllium multilayers coatings

Journal Article · Tue Feb 29 23:00:00 EST 2000 · Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.582224· OSTI ID:800195

Bajt, Sasa ^[1]

LBNL Library

No abstract prepared.

Print

Research Organization:: Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)

Sponsoring Organization:: US Department of Energy (US)

DOE Contract Number:: AC03-76SF00098

OSTI ID:: 800195

Report Number(s):: LBNL/ALS--13665

Journal Information:: Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films Journal Issue: 2 Vol. 18

Country of Publication:: United States

Language:: English

Similar Records

Molybdenum-ruthenium/beryllium multilayer coatings

Journal Article · Tue Feb 29 23:00:00 EST 2000 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films · OSTI ID:20215616

Experimental investigation of beryllium-based multilayer coatings for extreme ultraviolet lithography

Conference · Thu Jul 01 00:00:00 EDT 1999 · OSTI ID:794625

Nonspecular scattering from extreme ultraviolet multilayer coatings

Journal Article · Thu Jun 01 00:00:00 EDT 2000 · Physica B: Condensed Matter (Amsterdam) · OSTI ID:800101

Related Subjects

43 PARTICLE ACCELERATORS
ADVANCED LIGHT SOURCE
ADVANCED LIGHT SOURCE ALS
BERYLLIUM
COATINGS
LAYERS
MOLYBDENUM
RUTHENIUM