Molybdenum-ruthenium/beryllium multilayer coatings
- Information Science and Technology Program, Lawrence Livermore National Laboratory, Livermore, California 94550 (United States)
A newly developed beryllium-based multilayer system consisting of polycrystalline Be and amorphous MoRu layers is presented. The multilayer exhibits many remarkable properties: reflectivity as high as 69.3% at a wavelength of 11.4 nm (achieved with 50 bilayers giving a bandwidth of 0.35 nm), near-zero intrinsic stress, and excellent smoothing properties. As compared with Mo/Si multilayers at 13.4 nm, the shorter wavelength of 11.4 nm is better matched to the spectral output of gas-jet laser produced plasma sources, allowing a much higher optical throughput of the extreme ultraviolet lithography (EUVL) tool. The properties of MoRu/Be are compared to other beryllium-based multilayers, which have been considered for reflective coatings for EUVL optics. (c) 2000 American Vacuum Society.
- OSTI ID:
- 20215616
- Journal Information:
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Issue: 2 Vol. 18; ISSN 0734-2101; ISSN JVTAD6
- Country of Publication:
- United States
- Language:
- English
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