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Transmission electron microscopy analysis of interfacial layers in Ti/Ta/Al ohmic contacts to n-AlGaN

Journal Article · Wed Jul 31 04:00:00 EDT 2002 · Journal of Electron Microscopy

DOI:https://doi.org/10.1093/jmicro/51.Supplement.S171· OSTI ID:799664

Lim, Sung-Hwan ^[1]; Washburn, Jack; Liliental-Weber, Zuzanna

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Research Organization:: Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)

Sponsoring Organization:: BMDO Contract No. W31RPD-9-A9604 (US)

DOE Contract Number:: AC03-76SF00098

OSTI ID:: 799664

Report Number(s):: LBNL--51218

Journal Information:: Journal of Electron Microscopy, Journal Name: Journal of Electron Microscopy Journal Issue: Supps Vol. 51

Country of Publication:: United States

Language:: English

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Related Subjects

36 MATERIALS SCIENCE
INTERFACES
LAWRENCE BERKELEY LABORATORY
LAYERS
TRANSMISSION ELECTRON MICROSCOPY