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'Actinic-Only' defects in EUVL mask blanks - native defects, barely detectable by visible-light inspection

Conference ·
OSTI ID:797257
 [1]; ; ;
  1. LBNL Library
+ Show Author Affiliations
No abstract prepared.
Research Organization:
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
797257
Report Number(s):
LBNL/ALS--43512
Country of Publication:
United States
Language:
English

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Related Subjects

43 PARTICLE ACCELERATORS
ADVANCED LIGHT SOURCE
ADVANCED LIGHT SOURCE ALS
DEFECTS
LAWRENCE BERKELEY LABORATORY