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An x-ray spectromicroscopic study of the local structure of patterned titanium silicide

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.119467· OSTI ID:794870

No abstract prepared.

Research Organization:
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
794870
Report Number(s):
LBNL/ALS--879
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 1 Vol. 71; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English

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