Energy performance of cleanroom environmental systems
- LBNL Library
By developing metrics for evaluating cleanroom air system performance and overall load intensity, this paper provides energy benchmarking results for thirteen cleanroom environmental system performance, and identifies opportunities for improving cleanroom energy efficiency while maintaining or improving cleanroom contamination control. Comparisons with IEST Recommended Practice are made to examine the performance of cleanroom air systems. These results can serve as a vehicle to identify energy efficient cleanroom design practices and to highlight important issues in cleanroom operation and maintenance. Results from this study confirm that there are opportunities in improving energy efficiency of cleanroom environmental systems while maintaining effective contamination control.
- Research Organization:
- Ernest Orlando Lawrence Berkeley National Lab., CA (US)
- Sponsoring Organization:
- USDOE Assistant Secretary for Energy Efficiency and Renewable Energy. Office of Building Technology, State and Community Programs. Office of Building Research and Standards; Pacific Gas and Electric Company and California Institute for Energy Efficiency (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 793761
- Report Number(s):
- LBNL--49106; HT-438
- Country of Publication:
- United States
- Language:
- English
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