Performance evaluation of cleanroom environmental systems
- LBNL Library
This paper presents in-situ measurement results for energy and environmental performance of thirteen cleanroom systems located in the USA, including key metrics for evaluating cleanroom air system performance and overall electric power intensity. Comparisons with the IEST Recommended Practice (IEST-RP-CC012.1) are made to examine the performance of cleanroom air systems. Based upon the results, the paper discusses likely opportunities for improving cleanroom energy efficiency while maintaining effective contamination control. The paper concludes that there are wide variations in energy performance of cleanroom environmental systems, and that performance benchmarking can serve as a vehicle to identify energy efficient cleanroom design practices and to highlight important issues in cleanroom operation and maintenance.
- Research Organization:
- Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
- Sponsoring Organization:
- USDOE. Assistant Secretary for Energy Efficiency and Renewable Energy. Office of the Building Technologies Program; California Institute for Energy Efficiency (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 838604
- Report Number(s):
- LBNL--53282
- Journal Information:
- Journal of the Illuminating Engineering Society, Journal Name: Journal of the Illuminating Engineering Society Vol. 46
- Country of Publication:
- United States
- Language:
- English
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