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Atomic Resolution Microscopy of Semiconductor Defects and Interfaces

Conference ·
OSTI ID:7880

The optical arrangement of the scanning transmission electron microscope (STEM) allows formation of incoherent images by use of a large annular detector. Here we show this capability in the imaging of defects in GaN and the interfacial region of an Au/GaAs ohmic contact. A resolution of around 0.15 nm is attained. Such Z-contrast images show strong atomic number contrast and allow the probe to be positioned accurately at the defect or interface for the purpose of performing high spatial resolution electron energy-loss spectroscopy (EELS).

Research Organization:
Sandia National Labs., Albuquerque, NM (US); Sandia National Labs., Livermore, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
7880
Report Number(s):
SAND99-1303C
Country of Publication:
United States
Language:
English