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Modeling of a Silane LPCVD Process used for Microelectronics and MEMS Fabirication

Conference ·
OSTI ID:784036
 [1]; ; ;
  1. Sandia National Laboratories
+ Show Author Affiliations
Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
784036
Report Number(s):
SAND2001-1362C
Country of Publication:
United States
Language:
English

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