Feature-scale modeling of LPCVD & PECVD MEMS fabrication processes.
Conference
·
OSTI ID:889013
- Reaction Design, Inc., San Diego, CA (United States)
No abstract prepared.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 889013
- Report Number(s):
- SAND--2004-0948C
- Country of Publication:
- United States
- Language:
- English
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