Synthesis of InN/sub x/P/sub 1-x/ thin films by N ion implantation

Journal Article · Tue Oct 31 23:00:00 EST 2000 · Applied Physics Letters

OSTI ID:776639

Yu, K M ^[1]; Walukiewicz, W; Wu, J; Beeman, J W; Ager, III, J W; Haller, E E; Shan, W; Xin, H P; Tu, C W

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1. LBNL Library

No abstract prepared.

• Research Organization: Lawrence Berkeley National Lab., CA (US)
• Sponsoring Organization: USDOE Director, Office of Science. Office of Basic Energy Studies. Division of Materials Sciences (US)
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 776639
• Report Number(s): LBNL--47041
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 8 Vol. 78; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ION IMPLANTATION
SYNTHESIS
THIN FILMS