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The optimum Cs condition for high-resolution transmission electron microscopy

Conference ·
OSTI ID:775171

With the advent of electron-optical systems able to generate negative spherical aberration (usually called ''Cs correctors''), it has now become feasible to zero-out objective lens Cs in the high-resolution transmission electron microscope. However, I show that - instead of tuning out spherical aberration completely - there is an optimum value for the residual Cs that maximizes information transfer to the best possible resolution and depends only on the information limit of the microscope.

Research Organization:
Lawrence Berkeley National Lab., CA (US)
Sponsoring Organization:
USDOE Director, Office of Science. Office of Basic Energy Studies. Division of Materials Sciences (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
775171
Report Number(s):
LBNL--47219
Country of Publication:
United States
Language:
English

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