A hard x-ray scanning microprobe for fluorescence imaging and microdiffraction at the Advanced Photon Source

Conference · Tue Nov 02 04:00:00 EST 1999

OSTI ID:750575

Cai, L; Lai, B; Yun, W; Ilinski, P; Legnini, D; Maser, J; Rodrigues, W

A hard x-ray scanning microprobe based on zone plate optics and undulator radiation, in the energy region from 6 to 20 keV, has reached a focal spot size (FWHM) of 0.15 {micro}m (v) x 0.6 {micro}m (h), and a photon flux of 4 x 10{sup 9} photons/sec/0.01%BW. Using a slit 44 meters upstream to create a virtual source, a circular beam spot of 0.15 {micro}m in diameter can be obtained with a photon flux of one order of magnitude less. During fluorescence mapping of trace elements in a single human ovarian cell, the microprobe exhibited an imaging sensitivity for Pt (L{sub a} line) of 80 attograms/{micro}m{sup 2} for a count rate of 10 counts per second. The x-ray microprobe has been used to map crystallographic strain and multiquantum well thickness in micro-optoelectronic devices produced with the selective area growth technique.

• Research Organization: Argonne National Lab., IL (US)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 750575
• Report Number(s): ANL/XFD/CP-100395
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
43 PARTICLE ACCELERATORS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ACCELERATOR FACILITIES
ADVANCED PHOTON SOURCE
MICROANALYSIS
MICROSCOPY
OPTICAL SYSTEMS
SENSITIVITY
TRACE AMOUNTS
USES
X-RAY DIFFRACTION
X-RAY FLUORESCENCE ANALYSIS