X-ray microdiffraction studies of an integrated laser-modulator system

Technical Report · Mon Sep 01 04:00:00 EDT 1997

DOI:https://doi.org/10.2172/555519· OSTI ID:555519

Rodrigues, W ^[1]; Cai, Z; Yun, W; Lee, H R; Ilinski, P ^[1]; Isaacs, E ^[2]; Grenko, J ^[3]

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1. Argonne National Lab., IL (United States). Experimental Facilities Div.
2. Lucent Technologies, Murray Hill, NJ (United States). Bell Labs.
3. Lucent Technologies, Brienigsville, PA (United States). Microelectronics Group

The authors report the use of a spatially resolved x-ray microdiffraction technique for the structural study of an integrated laser-modulator system. The monochromatic (11 keV) x-ray beam microfocused to less than 1 {micro}m in the vertical direction was obtained using a phase zone plate. The photon flux at the focal spot exceeded 3 {times} 10{sup 10} photons/s/0.01% bw/{micro}m{sup 2}. The intense flux density and high spatial resolution of the focused beam was used to study the structure of a laser-modulator system, which is a 1-{micro}m-wide and 1-mm-long multi-quantum well structure on an InP substrate. The superlattice d-spacing and the strain field in the direction normal to the diffracting planes were mapped as a function of position along the length of the device.

• Research Organization: Argonne National Lab., IL (United States)
• Sponsoring Organization: USDOE Office of Energy Research, Washington, DC (United States)
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 555519
• Report Number(s): ANL/XFD/CP--93518; CONF-9706157--; ON: DE97053947
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
66 PHYSICS
BEAM OPTICS
CRYSTAL STRUCTURE
ELECTRONIC EQUIPMENT
EXPERIMENTAL DATA
INDIUM PHOSPHIDES
SYNCHROTRON RADIATION SOURCES
USES
X RADIATION
X-RAY DIFFRACTION