X-ray microdiffraction studies of an integrated laser-modulator system

Journal Article · Tue Jul 01 04:00:00 EDT 1997 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.54615· OSTI ID:21179506

Rodrigues, W ^[1]; Cai, Z; Yun, W; Lee, H -R; Ilinski, P ^[1]; Isaacs, E ^[2]; Grenko, J ^[3]

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1. Experimental Facilities Division, Argonne National Laboratory, Argonne, Illinois 60439 (United States)
2. Bell Laboratories, Lucent Technologies, 700 Mountain Avenue, Murray Hill, New Jersey 07974 (United States)
3. Microelectronics Group, Lucent Technologies, 9999 Hamilton Blvd., Brienigsville, Pennsylvania 18031 (United States)

We report the use of a spatially resolved x-ray microdiffraction technique for the structural study of an integrated laser-modulator system. The monochromatic (11 keV) x-ray beam microfocused to less than 1 {mu}m in the vertical direction was obtained using a phase zone plate. The photon flux at the focal spot exceeded 3x10{sup 10} photons/s/0.01%bw/{mu}m{sup 2}. The intense flux density and high spatial resolution of the focused beam was used to study the structure of a laser-modulator system, which is a 1-{mu}m-wide and 1-mm-long multi-quantum well structure on an InP substrate. The superlattice d-spacing and the strain field in the direction normal to the diffracting planes were mapped as a function of position along the length of the device.

• OSTI ID: 21179506
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 417; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
FLUX DENSITY
INDIUM PHOSPHIDES
KEV RANGE
LASER RADIATION
MONOCHROMATIC RADIATION
PHOTONS
QUANTUM WELLS
SPATIAL RESOLUTION
STRAINS
SUBSTRATES
SUPERLATTICES
X RADIATION
X-RAY DIFFRACTION