Isotope enrichment in sputter deposits
Journal Article
·
· Appl. Phys. Lett.; (United States)
The isotope ratio in metal deposits obtained by sputtering a flat target at low ion energy (100 eV) under normal ion incidence is a function of the ejection angle. The lighter isotope (s) are enriched in the direction normal to the target surface as result of ''reflective collisions'' which occur when an atom collides with one of heavier mass underneath. Experimental results are presented for Cu(63-65) and the seven Mo isotopes. (AIP)
- Research Organization:
- Electrical Engineering Department, University of Minnesota, Minneapolis, Minnesota 55455
- OSTI ID:
- 7328337
- Journal Information:
- Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 30:4; ISSN APPLA
- Country of Publication:
- United States
- Language:
- English
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