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Effect of substrate bias on the anisotropy in low voltage multitarget sputtered Gd--Co and Gd--Fe thin films

Conference · · AIP (Am. Inst. Phys.) Conf. Proc.; (United States)
OSTI ID:7317833

A low voltage multitarget sputtering system was used to study binary films having the same composition, independent of the dc substrate bias, by applying separate voltages to each target. Using this technique Gd-Co films were obtained possessing a perpendicular anisotropy sufficient to cause the magnetization to be normal to the film plane under grounded substrate conditions as well as when negatively biased. However, when the substrates were allowed to electrically float only in-plane magnetization was observed. In contrast, Gd-Fe films possessing perpendicular anisotropy could be obtained with or without an applied dc bias. The preparation conditions and x-ray (FeK/sub ..cap alpha../ radiation) diffraction analysis of these films are reported and their significance to the origin of the net uniaxial anisotropy is discussed.

OSTI ID:
7317833
Journal Information:
AIP (Am. Inst. Phys.) Conf. Proc.; (United States), Journal Name: AIP (Am. Inst. Phys.) Conf. Proc.; (United States) Vol. 34; ISSN APCPC
Country of Publication:
United States
Language:
English

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