Continuous cryopump with a device for regenerating the cryosurface

Patent · Tue Feb 16 04:00:00 EST 1988

OSTI ID:7271928

Foster, C A

A high throughput continuous cryopump is provided. The cryopump incorporates an improved method for regenerating the cryopumping surface while the pump is in continuous operation. The regeneration of the cryopumping surface does not thermally cycle the pump, and to this end a small chamber connected to a secondary pumping source serves to contain and exhaust frost removed from the cryopumping surface during such regeneration. The frost is exhausted at a rate substantially independent of the speed of the cryopump which enhances the capability of the pump to achieve a high compression ratio and allow the pump to operate continuously while the cryopumping surface is being regenerated. 8 figs.

• DOE Contract Number: W-7405-ENG-26
• Assignee: PTO; EDB-94-119437
• Patent Number(s): US 4724677; A
• Application Number: PPN: US 6-917197
• OSTI ID: 7271928
• Country of Publication: United States
• Language: English

Related Subjects

661210* -- Cryogenics-- (1992-)
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CRYOPUMPS
DESIGN
EQUIPMENT
FROST
ICE
LABORATORY EQUIPMENT
PERFORMANCE
PUMPS
REGENERATION
REMOVAL
VACUUM PUMPS