Continuous cryopump with a device for regenerating the cryosurface

Patent · Tue Feb 16 04:00:00 EST 1988

OSTI ID:5097944

Foster, C A

A cryopump adapted for regeneration during cryopumping operation for a selected gas is described comprising: a pump housing defining an interior volume; a cryopumping surface within the interior volume of the pump housing in fluid communication with an inlet for the gas; cryogenic cooling means in thermal contact with the cryopumping surface, the cooling means and the cryopumping surface maintained at a temperature substantially less than the gas to condense the gas and produce a condensate of the gas on the cryopumping surface; a cryopumping surface regeneration means for selectively removing the condensate from the cryopumping surface and expelling the removed condensate from the cryopump while the cryopump is in operation whereby the cryopump can continuously operate without thermal cycling of the cryopumping surface while the cryopumping surface is being regenerated, the surface regeneration means defining a secondary chamber proximate the cryopumping surface to remove and to receive the removed condensate without affecting pressure within the cryopump.

• Assignee: NOV; NOV-88-006556; EDB-88-104827
• Patent Number(s): US 4724677
• OSTI ID: 5097944
• Country of Publication: United States
• Language: English

Related Subjects

420201* -- Engineering-- Cryogenic Equipment & Devices
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CONDENSATES
COOLING SYSTEMS
CRYOGENICS
CRYOPUMPS
DESIGN
ENERGY SYSTEMS
EQUIPMENT
EVAPORATION
LABORATORY EQUIPMENT
OPERATION
PHASE TRANSFORMATIONS
PUMPING
PUMPS
REGENERATION
SURFACES
VACUUM PUMPS