Continuous cryopump with a device for regenerating the cryosurface

Patent · Fri Jan 01 04:00:00 EST 1988

OSTI ID:866496

Foster, Christopher A ^[1]

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1. Rte. 5, Box 101-B, Clinton, TN 37716

A high throughput continuous cryopump is provided. The cryopump (10) incorporates an improved method for regenerating the cryopumping surface (22) while the pump is in continuous operation. The regeneration of the cryopumping surface (22) does not thermally cycle the pump, and to this end a small chamber (91) connected to a secondary pumping source (60) serves to contain and exhaust frost removed from the cryopumping surface (22) during such regeneration. The frost is exhausted at a rate substantially independent of the speed of the cryopump which enhances the capability of the pump to achieve a high compression ratio and allow the pump to operate continuously while the cryopumping surface is being regenerated.

• Research Organization: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN
• DOE Contract Number: W-7405-ENG-26
• Assignee: Foster, Christopher A. (Rte. 5, Box 101-B, Clinton, TN 37716)
• Patent Number(s): US 4724677
• OSTI ID: 866496
• Country of Publication: United States
• Language: English

Related Subjects

/62/96/165/417/
10
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chamber
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connected
contain
continuous
continuous cryopump
continuous operation
continuously
cryopump
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cryosurface
cycle
device
enhances
exhaust
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frost
improved
improved method
incorporates
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rate
ratio
regenerated
regenerating
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removed
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substantially
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surface
thermally
throughput