Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Characterization by nuclear microanalysis: improvement of the sensitivity and correlation with ion probe techniques. Final report

Technical Report ·
OSTI ID:7270837
The technique of nuclear microanalysis by heavy ion backscattering was developed which makes possible a considerable improvement of the sensitivity to heavy impurities in a light semiconductor matrix. The problems of radiation detector degradation are discussed leading to improvement techniques using thin absorbers suitably chosen. A correlation with the ion probe allowed calibrating and measurements of reproductibility. (GRA)
Research Organization:
Paris-6 Univ., 75 (France). Lab. de Physique des Solides
OSTI ID:
7270837
Report Number(s):
N-75-30897
Country of Publication:
United States
Language:
English

Similar Records

Nuclear microanalysis as a probe of impurity-defect interactions
Conference · Mon Dec 31 23:00:00 EST 1979 · OSTI ID:5349334
Techniques for studying hydrogen and helium isotopes in materials: ion backscattering and nuclear microanalysis
Conference · Tue Dec 31 23:00:00 EST 1974 · OSTI ID:4175329
Mixed Element Microparticle Characterization by Electron Probe Microanalysis
Journal Article · Thu Mar 27 20:00:00 EDT 2025 · Microscopy and Microanalysis · OSTI ID:2544421

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400103* -- Radiometric & Radiochemical Procedures-- (-1987)
440101 -- Radiation Instrumentation-- General Detectors or Monitors & Radiometric Instruments
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
BACKSCATTERING
CHEMICAL ANALYSIS
IMPURITIES
ION PROBES
ION SCATTERING ANALYSIS
MEASURING INSTRUMENTS
MICROANALYSIS
NONDESTRUCTIVE ANALYSIS
PROBES
RADIATION DETECTORS
SCATTERING
SEMICONDUCTOR MATERIALS
SENSITIVITY