Reactive sputtering of molybdenum
The composition and crystalline structure of molybdenum-oxide thin films is controlled through the process of reaction dc magnetron sputtering. A systematic variation in target power density results in a continuous transition in the appearance of molybdenum-oxide from a translucent glass to a metallic-like film. New molybdenum-oxide crystal structures and compositions are found using XRD, SAD, AES depth profiling and STEM. 15 refs., 9 figs., 1 tab.
- Research Organization:
- Lawrence Livermore National Lab., CA (USA)
- Sponsoring Organization:
- DOE/DP
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 7258316
- Report Number(s):
- UCRL-102017; CONF-900419--2; ON: DE90008307
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
AUGER ELECTRON SPECTROSCOPY
CHALCOGENIDES
COHERENT SCATTERING
CRYSTAL STRUCTURE
DIFFRACTION
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
FILMS
MICROSCOPY
MOLYBDENUM COMPOUNDS
MOLYBDENUM OXIDES
OXIDES
OXYGEN COMPOUNDS
REFRACTORY METAL COMPOUNDS
SCATTERING
SPECTROSCOPY
SPUTTERING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
AUGER ELECTRON SPECTROSCOPY
CHALCOGENIDES
COHERENT SCATTERING
CRYSTAL STRUCTURE
DIFFRACTION
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
FILMS
MICROSCOPY
MOLYBDENUM COMPOUNDS
MOLYBDENUM OXIDES
OXIDES
OXYGEN COMPOUNDS
REFRACTORY METAL COMPOUNDS
SCATTERING
SPECTROSCOPY
SPUTTERING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION