Reactive sputtering of molybdenum-oxide gradient-index filters

Journal Article · Wed May 01 04:00:00 EDT 1991 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.577599· OSTI ID:5810760

Jankowski, A F; Schrawyer, L R; Perry, P L ^[1]

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1. Lawrence Livermore National Laboratory, Livermore, California 94550 (US)

Molybdenum-oxide gradient-index films are produced by reactive sputter deposition. A molybdenum metal target is sputtered continuously with an argon--oxygen gas mixture. For each target power used, a reproducible oxide composition and corresponding refractive index result. Repetitive variation of applied target power is used to produce a structure composed of discrete layers of preselected stoichiometry. The systematic control of a single process parameter, target power, simplifies the fabrication of molybdenum-oxide rugate filters.

• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 5810760
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 9:3; ISSN 0734-2101; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
AUGER ELECTRON SPECTROSCOPY
CHALCOGENIDES
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
FILMS
FILTERS
LAYERS
MICROSCOPY
MODULATION
MOLYBDENUM COMPOUNDS
MOLYBDENUM OXIDES
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
REFRACTIVITY
REFRACTORY METAL COMPOUNDS
SPECTROSCOPY
SPUTTERING
STOICHIOMETRY
TRANSITION ELEMENT COMPOUNDS
TRANSMISSION ELECTRON MICROSCOPY