Reactive sputtering of molybdenum-oxide gradient-index filters
Conference
·
OSTI ID:6535616
Molybdenum-oxide gradient-index films are produced by reactive sputter deposition. A molybdenum metal target is sputtered continuously with an argon-oxygen gas mixture. For each target power used, a reproducible oxide composition and corresponding refractive index result. Repetitive variation of applied target power is used to produce a structure composed of discrete layers of preselect stoichiometry. The systematic control of a single process parameter, target power, simplifies the fabrication of molybdenum-oxide rugate filters. 7 refs., 6 figs.
- Research Organization:
- Lawrence Livermore National Lab., CA (USA)
- Sponsoring Organization:
- DOE/DP
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 6535616
- Report Number(s):
- UCRL-JC-103668; CONF-901035--4; ON: DE91000939
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ARGON
AUGER ELECTRON SPECTROSCOPY
CHALCOGENIDES
COATINGS
DEPOSITION
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELEMENTS
FILTERS
FLUIDS
GASES
METALS
MICROSCOPY
MOLYBDENUM
MOLYBDENUM COMPOUNDS
MOLYBDENUM OXIDES
NONMETALS
OPTICAL FILTERS
OPTICAL PROPERTIES
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RARE GASES
REFRACTIVITY
REFRACTORY METAL COMPOUNDS
SPECTROSCOPY
SPUTTERING
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ARGON
AUGER ELECTRON SPECTROSCOPY
CHALCOGENIDES
COATINGS
DEPOSITION
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELEMENTS
FILTERS
FLUIDS
GASES
METALS
MICROSCOPY
MOLYBDENUM
MOLYBDENUM COMPOUNDS
MOLYBDENUM OXIDES
NONMETALS
OPTICAL FILTERS
OPTICAL PROPERTIES
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RARE GASES
REFRACTIVITY
REFRACTORY METAL COMPOUNDS
SPECTROSCOPY
SPUTTERING
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY